Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger

Thermal regulation of vibration-sensitive objects with conduit circuit having liquid metal, pump, and heat exchanger

US Patent 10054754 · Granted Aug 21, 2018

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and methods for measuring thermally induced reticle distortion2022
Illumination device for optimizing polarization in an illumination pupil2020
Apparatus and methods for measuring thermally induced reticle distortion2020
Fluid gauges comprising multiple differential pressure sensors2019
Apparatus and methods for measuring thermally induced reticle distortion2018
Environmental system including vacuum scavenge for an immersion lithography appa2018
Illumination device for optimizing polarization in an illumination pupil2017
Environmental system including vacuum scavenge for an immersion lithography appa2017
Position-measurement systems2016
Apparatus and methods for reducing autofocus error2016
Apparatus and methods for measuring thermally induced reticle distortion2016
Methods and devices for reducing errors in Goos-Hänchen corrections of displacem2016