| 12399195 |
Method for measuring, by measurement device, characteristics of surface of object to be measured, atomic force microscope for performing same method, and computer program stored in storage medium to perform same method |
Seung Hun BAIK, Seonghun Yun, Byoung-Woon Ahn, Sang-Il Park |
2025-08-26 |
| 12038455 |
Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source |
Sang-Il Park, Byoung-Woon Ahn, Soobong Choi |
2024-07-16 |
| 11598788 |
Measuring method for measuring heat distribution of specific space using SThM probe, method and device for detecting beam spot of light source |
Sang-Il Park, Byoung-Woon Ahn, Soobong Choi |
2023-03-07 |
| 11175308 |
Chip carrier exchanging device and atomic force microscopy apparatus having same |
Sang-Il Park, Yonghan Lee |
2021-11-16 |