| 11366022 |
Semiconductor device having a temperature sensor |
Atsushi Ohoka, Masao Uchida |
2022-06-21 |
|
| 9209262 |
Silicon carbide semiconductor device and method for manufacturing same |
Koutarou Tanaka, Masao Uchida, Osamu Kusumoto |
2015-12-08 |
|
| 9029874 |
Semiconductor device having a first silicon carbide semiconductor layer and a second silicon carbide semiconductor layer |
Nobuyuki Horikawa, Masao Uchida |
2015-05-12 |
|
| 8878194 |
Semiconductor element, semiconductor device, and semiconductor element manufacturing method |
Masao Uchida |
2014-11-04 |
|
| 8772788 |
Semiconductor element and method of manufacturing thereof |
Ryo Ikegami, Masao Uchida, Yuki Tomita |
2014-07-08 |
|
| 8754422 |
Semiconductor device and process for production thereof |
Chiaki Kudou, Kenya Yamashita |
2014-06-17 |
|
| 8748901 |
Silicon carbide semiconductor element |
Kunimasa Takahashi, Masao Uchida, Chiaki Kudou |
2014-06-10 |
|
| 8686439 |
Silicon carbide semiconductor element |
Kunimasa Takahashi, Masao Uchida, Chiaki Kudou |
2014-04-01 |
|
| 8653535 |
Silicon carbide semiconductor device having a contact region that includes a first region and a second region, and process for production thereof |
Chiaki Kudou, Ryo Ikegami |
2014-02-18 |
|
| 8222107 |
Method for producing semiconductor element |
Koutarou Tanaka, Masao Uchida |
2012-07-17 |
$49,000 |
| 8058631 |
Semiconductor manufacturing apparatus |
Kenji Yoneda |
2011-11-15 |
$95,000 |
| 7851871 |
Semiconductor device and method for fabricating the same |
Yuji Harada, Kazuyuki Sawada, Masaaki Okita |
2010-12-14 |
$96,000 |
| 7759711 |
Semiconductor device with substrate having increased resistance due to lattice defect and method for fabricating the same |
Kazuyuki Sawada, Yuji Harada, Saichirou Kaneko, Yoshimi Shimizu |
2010-07-20 |
$105,000 |
| 7638782 |
Semiconductor device manufacturing method and ion implanter used therein |
Kenji Yoneda |
2009-12-29 |
$191,000 |
| 7291535 |
Method and apparatus for fabricating semiconductor device |
Kenji Yoneda, Kazuma Takahashi |
2007-11-06 |
$404,000 |
| 6875623 |
Method for fabricating semiconductor device |
Kenji Yoneda |
2005-04-05 |
$190,000 |
| 6633047 |
Apparatus and method for introducing impurity |
Hiroko Kubo, Kenji Yoneda |
2003-10-14 |
$301,000 |
| 6451674 |
Method for introducing impurity into a semiconductor substrate without negative charge buildup phenomenon |
Hiroko Kubo, Kenji Yoneda |
2002-09-17 |
$288,000 |
| 6046069 |
Solid-state image pick-up device and method for manufacturing the same |
Katsuya Ishikawa, Takao Kuroda, Yuji Matsuda, Keishi Tachikawa |
2000-04-04 |
$389,000 |
| 6025210 |
Solid-state imaging device and method of manufacturing the same |
Yuji Matsuda |
2000-02-15 |
$963,000 |
| 5869854 |
Solid-state imaging device and method of manufacturing the same |
Yuji Matsuda |
1999-02-09 |
$202,000 |
| 5786607 |
Solid-state image pick-up device and method for manufacturing the same |
Katsuya Ishikawa, Takao Kuroda, Yuji Matsuda, Keishi Tachikawa |
1998-07-28 |
$283,000 |
