Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11280381 | Active damper for semiconductor metrology and inspection systems | Paul Doyle, Mark James Franceschi, Kenneth E. James | 2022-03-22 |
| 10784136 | FOUP purge shield | Paul Doyle | 2020-09-22 |
| 10451542 | Local purge within metrology and inspection systems | Paul Doyle, Ryan Tsai | 2019-10-22 |