Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7456947 | Inspecting apparatus and inspecting method | — | 2008-11-25 |
| 7369237 | Substrate processing apparatus and substrate processing system | Yasunori Ikeno, Katsuyuki Hashimoto, Masahiko Yazawa | 2008-05-06 |
| 7365295 | Image inspection system for correcting focal position in autofocusing | Takahiro KOMURO | 2008-04-29 |
| 7308329 | Method and apparatus for inspecting semiconductor wafer | Yasunori Ikeno, Yasutoshi Kitahara, Yoshiaki Suge | 2007-12-11 |
| 7102743 | Semiconductor wafer inspection apparatus | Haruyuki Tsuji, Yasutoshi Kitahara, Katsuyuki Hashimoto, Yasunori Ikeno, Masahiko Yazawa | 2006-09-05 |
| 7084383 | Image processing apparatus | Kazuhito Horiuchi | 2006-08-01 |
| 7053393 | Alignment apparatus for object on stage | Yoshihisa Taniguchi | 2006-05-30 |
| 6710320 | Small sized imaging device which detects position information and image information | — | 2004-03-23 |
| 6549290 | Method and apparatus for aligning target object | Yasutada Miura | 2003-04-15 |
| 6549825 | Alignment apparatus | — | 2003-04-15 |