Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8363099 | Microscope system and method of operation thereof | — | 2013-01-29 |
| 8212865 | Microscope image pickup apparatus, microscope image pickup program product, microscope image pickup program transmission medium and microscope image pickup method | — | 2012-07-03 |
| 7041512 | Electron beam exposure apparatus, electron beam exposing method, semiconductor element manufacturing method, and pattern error detection method | Masami Takigawa | 2006-05-09 |