Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8198015 | Method of forming mask pattern | — | 2012-06-12 |
| 7733460 | Aligner and self-cleaning method for aligner | Daigo Hoshino, Toshio Onodera, Yasuhiro Yamamoto | 2010-06-08 |
| 7485975 | Alignment error measuring mark and method for manufacturing semiconductor device using the same | — | 2009-02-03 |
| 6980278 | Self-cleaning method for semiconductor exposure apparatus | Toshio Onodera, Yasuhiro Yamamoto, Daigo Hoshino | 2005-12-27 |