Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7733460 | Aligner and self-cleaning method for aligner | Ryoichi Aoyama, Toshio Onodera, Yasuhiro Yamamoto | 2010-06-08 |
| 7183025 | Phase difference specifying method | — | 2007-02-27 |
| 7074547 | Photomask and method of fabricating semiconductor device by use of same | — | 2006-07-11 |
| 6980278 | Self-cleaning method for semiconductor exposure apparatus | Ryoichi Aoyama, Toshio Onodera, Yasuhiro Yamamoto | 2005-12-27 |
| 6894782 | Method of measuring defocusing and method of obtaining correct focusing | Takahiro Yamauchi | 2005-05-17 |
| 6872494 | Photomask and method of fabricating semiconductor device by use of same | — | 2005-03-29 |