Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7622394 | Method of fabricating semiconductor device including forming a protective layer and removing after etching a trench | — | 2009-11-24 |
| 7509858 | Acceleration sensor manufacturable by simplified method | — | 2009-03-31 |
| 7323354 | Method of manufacturing MEMS device | — | 2008-01-29 |
| 7153716 | Method of manufacturing a micro-electrical-mechanical system | — | 2006-12-26 |
| 7100448 | Accelerometer | — | 2006-09-05 |
| 7084069 | Method for manufacturing a semiconductor device | — | 2006-08-01 |
| 7029957 | Method of manufacturing semiconductor device having thin film SOI structure | — | 2006-04-18 |
| 7004030 | Acceleration sensor | Takasumi Kobayashi | 2006-02-28 |
| 6624010 | Method of manufacturing semiconductor device having thin film SOI structure | — | 2003-09-23 |
| 6500745 | Method for manufacturing sidewall spacers of a semiconductor device with high etch selectivity and minimized shaving | — | 2002-12-31 |
| 6413438 | Method of forming via hole by dry etching | — | 2002-07-02 |
| 6355572 | Method of dry etching organic SOG film | — | 2002-03-12 |
| 6200735 | Method for forming contact hole by dry etching | — | 2001-03-13 |
| 6037588 | Method for testing semiconductor device | Guo Liu, Hidetsugu Uchida, Izumi Aikawa, Norio Hirashita | 2000-03-14 |