Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8366514 | Semiconductor substrate planarization apparatus and planarization method | Satoru Ide, Kazuo Kobayashi, Noriyuki Motimaru, Eiichi Yamamoto, Tomio Kubo +1 more | 2013-02-05 |
| 8047897 | Substrate flat grinding device | Etsuo Fujita, Kazuo Kobayashi, Tomio Kubo | 2011-11-01 |
| 7238087 | Planarizing device and a planarization method for semiconductor substrates | Hirotaka Okonogi, Kazuo Kobayashi | 2007-07-03 |