Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6114093 | Method of drawing a pattern by direct writing with charged particle beam utilizing resist containing metal powder | — | 2000-09-05 |
| 5968686 | Charged-beam exposure mask and charged-beam exposure method | Hiroshi Nozue | 1999-10-19 |
| 5744430 | Engine oil composition | Kiyoshi Inoue, Akira Yaguchi, Masakuni Hirata | 1998-04-28 |
| 5731591 | Beam exposure system having improved mask unit | Hirosi Nozue | 1998-03-24 |