Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11486035 | Graphene synthesis chamber and method of synthesizing graphene by using the same | Dong-kwan Won | 2022-11-01 |
| 10643868 | Apparatus for processing substrate | Kang Heum YEON, Dae Seok SONG | 2020-05-05 |
| 10480075 | Graphene synthesis chamber and method of synthesizing graphene by using the same | Dong-kwan Won | 2019-11-19 |
| 9892942 | Substrate processing apparatus | Kang Heum YEON, Dae Seok SONG | 2018-02-13 |
| 6837589 | Heater module of rapid thermal processing apparatus | — | 2005-01-04 |