Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10914007 | Method and apparatus for substrate processing | Hyun Jin Park | 2021-02-09 |
| 10643868 | Apparatus for processing substrate | Won-Sik NAM, Kang Heum YEON | 2020-05-05 |
| 9892942 | Substrate processing apparatus | Won-Sik NAM, Kang Heum YEON | 2018-02-13 |