Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9637821 | Method for supplying vaporized precursor | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2017-05-02 |
| 8628618 | Precursor vapor generation and delivery system with filters and filter monitoring system | Damien Slevin, Brad Laird, Curtis Bailey, Ming Li, Sirish Reddy +2 more | 2014-01-14 |