Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6319842 | Method of cleansing vias in semiconductor wafer having metal conductive layer | Mukul Khosla, Lap Tam, Ronald D. Allen, Robert T. Rozbicki, Erich R. Klawuhn +1 more | 2001-11-20 |
| 6287643 | Apparatus and method for injecting and modifying gas concentration of a meta-stable or atomic species in a downstream plasma reactor | Gabriel I. Font-Rodriguez, Simon Selitser, Emerson Derryck Settles | 2001-09-11 |
| 5703689 | Optical spectrometer | — | 1997-12-30 |
| 5118200 | Method and apparatus for temperature measurements | Dimitry M. Kirillov | 1992-06-02 |
| 4807994 | Method of mapping ion implant dose uniformity | Susan Felch | 1989-02-28 |
| 4764026 | Semiconductor wafer temperature measuring device and method | Susan Felch | 1988-08-16 |
| 4661177 | Method for doping semiconductor wafers by rapid thermal processing of solid planar diffusion sources | — | 1987-04-28 |
| 4522845 | Process for producing a layer of a metal silicide by applying multichromatic radiation | Ronald T. Fulks | 1985-06-11 |