Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7845308 | Systems incorporating microwave heaters within fluid supply lines of substrate processing chambers and methods for use of such systems | Jason Stephen Corneille, Nancy E. Gilbert, Robert Tas, Steven Flanders, Timothy Joseph Franklin +2 more | 2010-12-07 |
| 6296906 | Annealing process for low-k dielectric film | Jim Stimmell, Ajay Saproo | 2001-10-02 |