Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5171415 | Cooling method and apparatus for magnetron sputtering | Kenneth C. Miller | 1992-12-15 |
| 5133284 | Gas-based backside protection during substrate processing | Michael E. Thomas, Everhardus P. van de Van | 1992-07-28 |
| 5063175 | Method for manufacturing a planar electrical interconnection utilizing isotropic deposition of conductive material | — | 1991-11-05 |
| 4976809 | Method of forming an aluminum conductor with highly oriented grain structure | — | 1990-12-11 |
| 4612257 | Electrical interconnection for semiconductor integrated circuits | — | 1986-09-16 |
| 4517225 | Method for manufacturing an electrical interconnection by selective tungsten deposition | — | 1985-05-14 |
| 4495221 | Variable rate semiconductor deposition process | — | 1985-01-22 |