Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679405 | Method for preventing substrate backside deposition during a chemical vapor deposition operation | Michael E. Thomas, Eliot K. Broadbent | 1997-10-21 |
| 5133284 | Gas-based backside protection during substrate processing | Michael E. Thomas, Eliot K. Broadbent | 1992-07-28 |