Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109448 | Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes | Louis Fierro, James D. Getty | 2018-10-23 |
| 8623471 | Plasma treatment system | James S. Tyler, James D. Getty, Robert S. Condrashoff | 2014-01-07 |
| 8613827 | Plasma treatment system | James S. Tyler, James D. Getty, Robert S. Condrashoff | 2013-12-24 |
| 8480850 | Plasma treatment system | James S. Tyler, James D. Getty, Robert S. Condrashoff | 2013-07-09 |
| 8372238 | Multiple-electrode plasma processing systems with confined process chambers and interior-bussed electrical connections with the electrodes | Louis Fierro, James D. Getty | 2013-02-12 |
| 8333166 | Plasma treatment systems and methods for uniformly distributing radiofrequency power between multiple electrodes | Elmer M. Calica, Robert S. Condrashoff, Louis Fierro, James D. Getty | 2012-12-18 |
| 7455735 | Width adjustable substrate support for plasma processing | — | 2008-11-25 |
| 7013834 | Plasma treatment system | James S. Tyler, James D. Getty, Robert S. Condrashoff | 2006-03-21 |