| 8623471 |
Plasma treatment system |
James S. Tyler, James D. Getty, Thomas V. Bolden, II |
2014-01-07 |
| 8613827 |
Plasma treatment system |
James S. Tyler, James D. Getty, Thomas V. Bolden, II |
2013-12-24 |
| 8480850 |
Plasma treatment system |
James S. Tyler, James D. Getty, Thomas V. Bolden, II |
2013-07-09 |
| 8333166 |
Plasma treatment systems and methods for uniformly distributing radiofrequency power between multiple electrodes |
Thomas V. Bolden, II, Elmer M. Calica, Louis Fierro, James D. Getty |
2012-12-18 |
| 8329590 |
Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate |
James D. Getty, James S. Tyler |
2012-12-11 |
| 7845309 |
Ultra high speed uniform plasma processing system |
James P. Fazio, James D. Getty, James S. Tyler |
2010-12-07 |
| 7635418 |
Plasma processing apparatus and methods for removing extraneous material from selected areas on a substrate |
James D. Getty, James S. Tyler |
2009-12-22 |
| 7013834 |
Plasma treatment system |
James S. Tyler, James D. Getty, Thomas V. Bolden, II |
2006-03-21 |