Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8278219 | Method for purifying chemical added with chelating agent | Masamitsu IIYAMA | 2012-10-02 |
| 8202429 | Method for recovering a used slurry | Masamitsu IIYAMA | 2012-06-19 |
| 7625262 | Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry | Nobuyoshi Nambu, Osamu Ito, Masaaki Ogitsu, Kazuo Inomata | 2009-12-01 |
| 6187201 | System for producing ultra-pure water | Yoshiaki Noma | 2001-02-13 |
| 5573662 | Apparatus for treatment of low-concentration organic waste water | Senri Ojima | 1996-11-12 |