Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7625262 | Material for purification of semiconductor polishing slurry, module for purification of semiconductor polishing slurry and process for producing semiconductor polishing slurry | Mitsugu Abe, Nobuyoshi Nambu, Osamu Ito, Kazuo Inomata | 2009-12-01 |
| 6413151 | CMP slurry recycling apparatus and method for recycling CMP slurry | Hiroshi Mizuno, Takuya Nagamine, Toru Kikuchi | 2002-07-02 |