Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9131829 | Label sheet for cleaning and conveying member having cleaning function | Makoto Namikawa, Yoshio Terada, Eiji Toyoda | 2015-09-15 |
| 8460783 | Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these | Makoto Namikawa, Yoshio Terada | 2013-06-11 |
| 7793668 | Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them | Makoto Namikawa, Yoshio Terada, Eiji Toyoda, Hirofumi Fujii, Daisuke Uenda +4 more | 2010-09-14 |
| 7712177 | Cleaning sheet and its production method as well as transporting member having such cleaning sheet | Yoshinori Yoshida, Yohei Maeno | 2010-05-11 |
| 7713356 | Cleaning sheet, conveying member using the same, and substrate processing equipment cleaning method using them | Makoto Namikawa, Yoshio Terada, Eiji Toyoda | 2010-05-11 |