Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10506700 | Plasma treatment apparatus | Yasuo Suzuki | 2019-12-10 |
| 9299529 | Ion source and repeller structure | — | 2016-03-29 |
| 8680491 | Method of controlling ion implantation apparatus | — | 2014-03-25 |
| 5132545 | Ion implantation apparatus | Kazuhiro Shono, Shigeo Sasaki, Susumu Katoh, Masao Naitou, Tetsuya Nakanishi +2 more | 1992-07-21 |
| 4915977 | Method of forming a diamond film | Koji Okamoto, Eiji Kamijo | 1990-04-10 |