Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506662 | Method for forming an SOI substrate by use of a plasma ion irradiation | Atsushi Ogura, Youichirou Numasawa, Akira Doi | 2003-01-14 |
| 6160262 | Method and apparatus for deflecting charged particles | Masahiko Aoki | 2000-12-12 |
| 5189303 | Ion source having a mass separation device | Hiroshi Nakazato | 1993-02-23 |