Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7485204 | ECR plasma source and ECR plasma device | Toshiyuki Nozaki, Fumio Tanaka | 2009-02-03 |
| 5208629 | Optical projection exposure method and system using the same | Yoshinobu Takeuchi, Kazuhiko Komatsu, Emi Tamechika, Katsuhiro Harada, Yoshiaki Mimura +1 more | 1993-05-04 |
| 5003152 | Microwave transforming method and plasma processing | Hiroshi Nishimura, Mikiho Kiuchi | 1991-03-26 |
| 4857809 | Microwave ion source | Yasuhiro Torii, Iwao Watanabe, Masaru Shimada | 1989-08-15 |
| 4566940 | Manufacturing process for semiconductor integrated circuits | Manabu Itsumi, Kohei Ehara, Susumu Muramoto | 1986-01-28 |
| 4564997 | Semiconductor device and manufacturing process thereof | Susumu Muramoto, Kohei Ehara, Manabu Itsumi | 1986-01-21 |
| 4543266 | Method of fabricating a membrane structure | Mikiho Kiuchi, Misao Sekimoto | 1985-09-24 |
| 4543592 | Semiconductor integrated circuits and manufacturing process thereof | Manabu Itsumi, Kohei Ehara, Susumu Muramoto | 1985-09-24 |
| 4492620 | Plasma deposition method and apparatus | Toshiro Ono | 1985-01-08 |
| 4450031 | Ion shower apparatus | Toshiro Ono | 1984-05-22 |
| 4448800 | Method for the manufacture of semiconductor device using refractory metal in a lift-off step | Kohei Ehara, Susumu Muramoto, Takashi Morimoto, Manabu Itsumi | 1984-05-15 |
| 4401054 | Plasma deposition apparatus | Hideo Yoshihara, Shinichi Yamazaki | 1983-08-30 |