Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5580824 | Method for fabrication of interconnections in semiconductor devices | Kimiaki Tanaka | 1996-12-03 |
| 5396120 | Semiconductor integrated unit | Shoichi Iwasa | 1995-03-07 |
| 5329335 | Method and apparatus for projection exposure | Toshio Wada, Hiroyuki Inoue | 1994-07-12 |
| 5238865 | Process for producing laminated semiconductor substrate | — | 1993-08-24 |
| 5192087 | Device for supporting a wafer | Hideaki Kawashima | 1993-03-09 |
| 5185286 | Process for producing laminated semiconductor substrate | — | 1993-02-09 |
| 5083184 | Capacitance device | — | 1992-01-21 |