Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10241395 | Pattern correction amount calculating apparatus, pattern correction amount calculating method, and storage medium | — | 2019-03-26 |
| 8710468 | Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample | Dai Tsunoda, Masahiro Shoji, Shuji Hada, Ayuko Sato | 2014-04-29 |