Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8710468 | Method of and apparatus for evaluating an optimal irradiation amount of an electron beam for drawing a pattern onto a sample | Dai Tsunoda, Masahiro Shoji, Hiroyuki Tsunoe, Shuji Hada | 2014-04-29 |