Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5912469 | Charged-particle-beam microlithography apparatus | — | 1999-06-15 |
| 5912467 | Method and apparatus for measurement of pattern formation characteristics | — | 1999-06-15 |
| 5888699 | Pattern transfer method and transfer apparatus by charged particle beam | — | 1999-03-30 |
| 5879842 | Pattern projection method with charged particle beam utilizing continuous movement of mask and substrate | — | 1999-03-09 |
| 5874198 | Charged particle beam transfer method | — | 1999-02-23 |
| 5856677 | Pattern projection method with charged particle beam and charged particle beam projection system | — | 1999-01-05 |
| 5817442 | Pattern projection method with charged particle beam utilizing continuous movement to perform projection | — | 1998-10-06 |
| 5798196 | Pattern transfer method utilizing distribution condition evaluation by charged particle beam | — | 1998-08-25 |
| 5789119 | Image transfer mask for charged particle-beam | — | 1998-08-04 |
| 5700604 | Charged particle beam exposure method and mask employed therefor | — | 1997-12-23 |
| 5624774 | Method for transferring patterns with charged particle beam | Mamoru Nakasuji | 1997-04-29 |
| 5567949 | Charged particle beam transfer apparatus | — | 1996-10-22 |