Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6323952 | Flatness measuring apparatus | Hosei Nakahira, Eiji Matsukawa, Hironobu Sakuta | 2001-11-27 |
| 4890245 | Method for measuring temperature of semiconductor substrate and apparatus therefor | Makoto Uehara, Hajime Ichikawa, Shigeru Kato | 1989-12-26 |
| 4859832 | Light radiation apparatus | Makoto Uehara, Hajime Ichikawa, Shigeru Kato | 1989-08-22 |