Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499935 | Photomask case, transporting apparatus, and transporting method | Shinichi Hirakawa, Yutaka Endo | 2002-12-31 |
| 6473157 | Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrate | — | 2002-10-29 |
| 6184970 | Master plate transporting system | Yutaka Endo, Akio Nishikata | 2001-02-06 |
| 6048655 | Method of carrying and aligning a substrate | — | 2000-04-11 |
| 5743409 | Case for housing a substrate | Tsuneaki Orikasa | 1998-04-28 |
| 5498118 | Apparatus for and method of carrying a substrate | — | 1996-03-12 |
| 5442163 | Exposure apparatus | Masao Nakajima, Toshinori Tsuruya | 1995-08-15 |