Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499456 | Exhaust purification device and exhaust purification method | Naoto Murasawa, Masahiro Kajiyama, Takayuki Mukunashi | 2022-11-15 |
| 6523748 | Substrate for exposure, readout method and apparatus for the substrate, exposure apparatus, and method for producing semiconductor devices using the exposure apparatus | — | 2003-02-25 |
| 6184970 | Master plate transporting system | Kanefumi Nakahara, Yutaka Endo | 2001-02-06 |