Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7042602 | Image correction apparatus and recording medium having image correction program | Yukio Nakagawa | 2006-05-09 |
| 6771815 | Image correction apparatus and recording medium for storing image correction program | Yukio Nakagawa | 2004-08-03 |
| 6724464 | Position detecting method and unit, optical characteristic measuring method and unit, exposure apparatus, and device manufacturing method | Toru Fujii, Fuyuhiko Inoue | 2004-04-20 |