Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5801389 | Acousto-optic modulator, position detector using it, and projection exposure apparatus | Kazuya Ota | 1998-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5801389 | Acousto-optic modulator, position detector using it, and projection exposure apparatus | Kazuya Ota | 1998-09-01 |