Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974653 | Methods for critical dimension and focus mapping using critical dimension test marks | Frank C. Leung, Etsuya Morita, Christopher Howard Putnam, Ronald A. Pierce, Norman E. Roberts | 2005-12-13 |