Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347521 | Heating member, electrostatic chuck, and ceramic heater | Hironobu Ishikawa, Yasuhiko Inui, Jun Kurano | 2019-07-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10347521 | Heating member, electrostatic chuck, and ceramic heater | Hironobu Ishikawa, Yasuhiko Inui, Jun Kurano | 2019-07-09 |