Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10945312 | Heating device | — | 2021-03-09 |
| 10626501 | Heating device | Kazutaka Tanaka | 2020-04-21 |
| 10615060 | Heating device | — | 2020-04-07 |
| 10347521 | Heating member, electrostatic chuck, and ceramic heater | Hironobu Ishikawa, Yasuhiko Inui, Taichi KIBE | 2019-07-09 |
| 9691652 | Carrier device and ceramic member | Kaname Miwa, Tomonori Niwa | 2017-06-27 |
| 9276504 | Carrier device and ceramic member | Kaname Miwa, Tomonori Niwa | 2016-03-01 |