Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11560316 | Process and apparatus for removal of impurities from chlorosilanes | Kai Schillinger | 2023-01-24 |
| 11519094 | Apparatus and method for etching one side of a semiconductor layer of a workpiece | Stefan Reber, Kai Schillinger, Benjamin Reichhart | 2022-12-06 |