Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915922 | Silicon wafer for an electronic component and method for the production thereof | Stefan Reber, Frank Siebke | 2024-02-27 |
| 11862462 | Method and apparatus for the continuous vapor deposition of silicon on substrates | Stefan Reber | 2024-01-02 |
| 11560316 | Process and apparatus for removal of impurities from chlorosilanes | Nena MILENKOVIC | 2023-01-24 |
| 11519094 | Apparatus and method for etching one side of a semiconductor layer of a workpiece | Stefan Reber, Benjamin Reichhart, Nena MILENKOVIC | 2022-12-06 |
| 10985005 | Silicon wafer for an electronic component and method for the production thereof | Stefan Reber, Frank Siebke | 2021-04-20 |
| 10975490 | Apparatus and method for etching one side of a semiconductor substrate | Stefan Reber | 2021-04-13 |
| 10943826 | Method for arranging a plurality of seed substrates on a carrier element and carrier element having seed substrates | Stefan Reber | 2021-03-09 |
| 10508365 | Method and device for producing a semiconductor layer | Stefan Reber, Frank Siebke | 2019-12-17 |