Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183545 | Plasma reactor | Sung-Joong Kim, Yoon Jae Kim, Je Hyeong Yoo | 2024-12-31 |
| 9773645 | Remote plasma generator using ceramic | Ja Woo Lee, Chung Huan Jeon, Heok-Jae Lee, Jang-Hyoun Youm, Sang Jean Jeon +7 more | 2017-09-26 |
| 9054146 | Substrate transfer equipment and high speed substrate processing system using the same | — | 2015-06-09 |
| 8409400 | Inductive plasma chamber having multi discharge tube bridge | — | 2013-04-02 |
| 8018163 | Capacitively coupled plasma reactor | — | 2011-09-13 |
| 7952048 | Plasma source with discharge inducing bridge and plasma processing system using the same | Dae-Kyu Choi | 2011-05-31 |
| 7477022 | System and method for driving a multi-lamp | Sang-Don Choi | 2009-01-13 |
| 7285916 | Multi chamber plasma process system | — | 2007-10-23 |