Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6096232 | Dry etching system and dry etching method using plasma | — | 2000-08-01 |
| 5366920 | Method for fabricating a thin film capacitor | Shintaro Yamamichi, Hirohito Watanabe, Toshiyuki Sakuma | 1994-11-22 |