Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6049085 | Charged particle beam exposure method and method for making patterns on wafer | — | 2000-04-11 |
| 6037606 | Construction of and method of manufacturing an MIM or MIS electron source | — | 2000-03-14 |
| 6034376 | Electron-beam exposure system and a method applied therein | — | 2000-03-07 |