Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7064079 | Method of removing polymer and apparatus for doing the same | Hiroyuki Sonoda, Hidehiko Kawaguchi, Hiroki Ohno | 2006-06-20 |
| 6231425 | Polishing apparatus and method | Shoichi Inaba, Takao Katsuyama | 2001-05-15 |
| 6116993 | Chemicomechanical polishing device for a semiconductor wafer | — | 2000-09-12 |
| 6093080 | Polishing apparatus and method | Shoichi Inaba, Takao Katsuyama | 2000-07-25 |