Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953643 | Mask shaping using temporal and spatial coherence in ultra high resolution lithography | — | 2005-10-11 |
| 6383697 | Ultra high resolution lithographic imaging and printing and defect reduction by exposure near the critical condition utilizing fresnel diffraction | Yuli Vladimirsky | 2002-05-07 |