Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8539392 | Method for compensating proximity effects of particle beam lithography processes | Kuen-Yu Tsai, Chun-Hung Liu, Pei-Lin Tien | 2013-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8539392 | Method for compensating proximity effects of particle beam lithography processes | Kuen-Yu Tsai, Chun-Hung Liu, Pei-Lin Tien | 2013-09-17 |