Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10562223 | Imprint device | Kenta Suzuki, SungWon Youn | 2020-02-18 |
| 10189203 | Method for forming micropattern of polyimide using imprinting | Sung Won YOUN, Sang Cheon Park, Hideki Takagi, Kenta Suzuki | 2019-01-29 |
| 8308961 | Method of producing a mold for imprint lithography, and mold | — | 2012-11-13 |
| 6065780 | Vibration-isolator joint for vacuum device | — | 2000-05-23 |
| 5493125 | Charged beam apparatus | Shigeo Okayama, Mutsuo Ogura, Masanori Komuro | 1996-02-20 |