Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9930766 | Apparatus and method for determining the type, density and temperature of neutral radicals in plasma | Chia Sern CHAN, Shuyan XU, Pavlo Rutkevych | 2018-03-27 |
| 9837562 | Capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate | Shuyan XU, Chia Sern CHAN | 2017-12-05 |