Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10672592 | Non-thermal soft plasma cleaning | — | 2020-06-02 |
| 9930766 | Apparatus and method for determining the type, density and temperature of neutral radicals in plasma | Shuyan XU, Pavlo Rutkevych, Luxiang Xu | 2018-03-27 |
| 9837562 | Capacitively coupled electrodeless plasma apparatus and a method using capacitively coupled electrodeless plasma for processing a silicon substrate | Shuyan XU, Luxiang Xu | 2017-12-05 |