Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11877435 | Semiconductor structure having air gap | — | 2024-01-16 |
| 11823951 | Method of manufacturing semiconductor structure having air gap | — | 2023-11-21 |
| 7252099 | Wafer cleaning apparatus with multiple wash-heads | Chih-Kun Chen | 2007-08-07 |
| 6941811 | Method and apparatus for detecting wafer flaw | Chih-Kun Chen, Tun-Yuan Lo | 2005-09-13 |
| 6920796 | Device used for detecting clamping force of processed object and method thereof | Chih-Kun Chen, Chung-Min Lin, Shan-Chang Wang, Jiun-Bo Wang | 2005-07-26 |
| 6834547 | Humidity sensor and fabrication method thereof | Chih-Kun Chen, Chung-Min Lin, Hsin-Chuan Tsai | 2004-12-28 |